3/15/2012	9:10:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	9:10:23 AM	Recipe started at 9:10 AM
3/15/2012	9:10:23 AM	Helium valve closed
3/15/2012	9:10:23 AM	H2 valve closed
3/15/2012	9:10:23 AM	BCl3 valve closed
3/15/2012	9:10:23 AM	PH3 valve closed
3/15/2012	9:10:23 AM	SiCl4 pre valve closed
3/15/2012	9:10:23 AM	SiCl4 post valve closed
3/15/2012	9:10:23 AM	Main Vac valve closed
3/15/2012	9:10:23 AM	Bypass valve closed
3/15/2012	9:10:23 AM	Bubbler valve closed
3/15/2012	9:10:23 AM	Helium MFC set to  0.000000
3/15/2012	9:10:23 AM	H2 MFC set to  0.000000
3/15/2012	9:10:23 AM	BCl3 MFC set to  0.000000
3/15/2012	9:10:23 AM	PH3 MFC set to  0.000000
3/15/2012	9:10:23 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:10:23 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:10:23 AM	Tube furnace set to 0
3/15/2012	9:10:26 AM	H2 valve closed
3/15/2012	9:10:26 AM	BCl3 valve closed
3/15/2012	9:10:26 AM	PH3 valve closed
3/15/2012	9:10:26 AM	SiCl4 pre valve closed
3/15/2012	9:10:26 AM	SiCl4 post valve closed
3/15/2012	9:10:26 AM	Main Vac valve closed
3/15/2012	9:10:26 AM	Bypass valve closed
3/15/2012	9:10:26 AM	Bubbler valve closed
3/15/2012	9:10:26 AM	Helium valve opened
3/15/2012	9:10:26 AM	Helium MFC set to  500.000000
3/15/2012	9:10:26 AM	H2 MFC set to  0.000000
3/15/2012	9:10:26 AM	BCl3 MFC set to  0.000000
3/15/2012	9:10:26 AM	PH3 MFC set to  0.000000
3/15/2012	9:10:26 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:10:26 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:10:26 AM	Tube furnace set to 0
3/15/2012	9:11:32 AM	Helium valve closed
3/15/2012	9:11:32 AM	H2 valve closed
3/15/2012	9:11:32 AM	BCl3 valve closed
3/15/2012	9:11:32 AM	PH3 valve closed
3/15/2012	9:11:32 AM	SiCl4 pre valve closed
3/15/2012	9:11:32 AM	SiCl4 post valve closed
3/15/2012	9:11:32 AM	Main Vac valve closed
3/15/2012	9:11:32 AM	Bypass valve closed
3/15/2012	9:11:32 AM	Bubbler valve closed
3/15/2012	9:11:32 AM	Helium MFC set to  0.000000
3/15/2012	9:11:32 AM	H2 MFC set to  0.000000
3/15/2012	9:11:32 AM	BCl3 MFC set to  0.000000
3/15/2012	9:11:32 AM	PH3 MFC set to  0.000000
3/15/2012	9:11:32 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:11:32 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:11:32 AM	Tube furnace set to 0
3/15/2012	9:11:33 AM	Run finished at 9:11 AM
3/15/2012	9:11:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	9:21:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	9:21:11 AM	Recipe started at 9:21 AM
3/15/2012	9:21:11 AM	Helium valve closed
3/15/2012	9:21:11 AM	H2 valve closed
3/15/2012	9:21:11 AM	BCl3 valve closed
3/15/2012	9:21:11 AM	PH3 valve closed
3/15/2012	9:21:11 AM	SiCl4 pre valve closed
3/15/2012	9:21:11 AM	SiCl4 post valve closed
3/15/2012	9:21:11 AM	Main Vac valve closed
3/15/2012	9:21:11 AM	Bubbler valve closed
3/15/2012	9:21:11 AM	Bypass valve opened
3/15/2012	9:21:11 AM	Helium MFC set to  0.000000
3/15/2012	9:21:11 AM	H2 MFC set to  0.000000
3/15/2012	9:21:11 AM	BCl3 MFC set to  0.000000
3/15/2012	9:21:11 AM	PH3 MFC set to  0.000000
3/15/2012	9:21:11 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:21:11 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:21:11 AM	Tube furnace set to 0
3/15/2012	9:22:15 AM	Helium valve closed
3/15/2012	9:22:15 AM	H2 valve closed
3/15/2012	9:22:15 AM	BCl3 valve closed
3/15/2012	9:22:15 AM	PH3 valve closed
3/15/2012	9:22:15 AM	SiCl4 pre valve closed
3/15/2012	9:22:15 AM	SiCl4 post valve closed
3/15/2012	9:22:15 AM	Main Vac valve closed
3/15/2012	9:22:15 AM	Bubbler valve closed
3/15/2012	9:22:15 AM	Bypass valve opened
3/15/2012	9:22:15 AM	Helium MFC set to  0.000000
3/15/2012	9:22:15 AM	H2 MFC set to  0.000000
3/15/2012	9:22:15 AM	BCl3 MFC set to  0.000000
3/15/2012	9:22:15 AM	PH3 MFC set to  0.000000
3/15/2012	9:22:15 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:22:15 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:22:15 AM	Tube furnace set to 0
3/15/2012	9:23:15 AM	Helium valve closed
3/15/2012	9:23:15 AM	H2 valve closed
3/15/2012	9:23:15 AM	BCl3 valve closed
3/15/2012	9:23:15 AM	PH3 valve closed
3/15/2012	9:23:15 AM	SiCl4 pre valve closed
3/15/2012	9:23:15 AM	SiCl4 post valve closed
3/15/2012	9:23:15 AM	Bypass valve closed
3/15/2012	9:23:15 AM	Bubbler valve closed
3/15/2012	9:23:15 AM	Main Vac valve opened
3/15/2012	9:23:15 AM	Helium MFC set to  0.000000
3/15/2012	9:23:15 AM	H2 MFC set to  0.000000
3/15/2012	9:23:15 AM	BCl3 MFC set to  0.000000
3/15/2012	9:23:15 AM	PH3 MFC set to  0.000000
3/15/2012	9:23:15 AM	SiCl4 MFC set to  0.000000
3/15/2012	9:23:15 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:23:16 AM	Tube furnace set to 0
3/15/2012	9:23:17 AM	Run finished at 9:23 AM
3/15/2012	9:23:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	10:50:12 AM	Main Vac valve closed
3/15/2012	10:50:50 AM	Main Vac valve opened
3/15/2012	10:52:17 AM	Recipe started at 10:52 AM
3/15/2012	10:52:17 AM	Helium valve closed
3/15/2012	10:52:17 AM	H2 valve closed
3/15/2012	10:52:17 AM	BCl3 valve closed
3/15/2012	10:52:17 AM	PH3 valve closed
3/15/2012	10:52:17 AM	SiCl4 pre valve closed
3/15/2012	10:52:17 AM	SiCl4 post valve closed
3/15/2012	10:52:17 AM	Main Vac valve closed
3/15/2012	10:52:17 AM	Bypass valve closed
3/15/2012	10:52:17 AM	Bubbler valve closed
3/15/2012	10:52:17 AM	Helium MFC set to  0.000000
3/15/2012	10:52:17 AM	H2 MFC set to  0.000000
3/15/2012	10:52:17 AM	BCl3 MFC set to  0.000000
3/15/2012	10:52:17 AM	PH3 MFC set to  0.000000
3/15/2012	10:52:17 AM	SiCl4 MFC set to  0.000000
3/15/2012	10:52:17 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:52:17 AM	Tube furnace set to 0
3/15/2012	10:52:20 AM	Helium valve closed
3/15/2012	10:52:20 AM	BCl3 valve closed
3/15/2012	10:52:20 AM	PH3 valve closed
3/15/2012	10:52:20 AM	SiCl4 pre valve closed
3/15/2012	10:52:20 AM	SiCl4 post valve closed
3/15/2012	10:52:20 AM	Main Vac valve closed
3/15/2012	10:52:20 AM	Bypass valve closed
3/15/2012	10:52:20 AM	Bubbler valve closed
3/15/2012	10:52:20 AM	H2 valve opened
3/15/2012	10:52:20 AM	Helium MFC set to  0.000000
3/15/2012	10:52:20 AM	H2 MFC set to  500.000000
3/15/2012	10:52:20 AM	BCl3 MFC set to  0.000000
3/15/2012	10:52:20 AM	PH3 MFC set to  0.000000
3/15/2012	10:52:20 AM	SiCl4 MFC set to  0.000000
3/15/2012	10:52:20 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:52:20 AM	Tube furnace set to 0
3/15/2012	10:53:27 AM	Helium valve closed
3/15/2012	10:53:27 AM	BCl3 valve closed
3/15/2012	10:53:27 AM	PH3 valve closed
3/15/2012	10:53:27 AM	SiCl4 pre valve closed
3/15/2012	10:53:27 AM	SiCl4 post valve closed
3/15/2012	10:53:27 AM	Main Vac valve closed
3/15/2012	10:53:27 AM	Bypass valve closed
3/15/2012	10:53:27 AM	H2 valve opened
3/15/2012	10:53:27 AM	Bubbler valve opened
3/15/2012	10:53:27 AM	Helium MFC set to  0.000000
3/15/2012	10:53:27 AM	H2 MFC set to  500.000000
3/15/2012	10:53:27 AM	BCl3 MFC set to  0.000000
3/15/2012	10:53:27 AM	PH3 MFC set to  0.000000
3/15/2012	10:53:27 AM	SiCl4 MFC set to  0.000000
3/15/2012	10:53:27 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:53:27 AM	Tube furnace set to 0
3/15/2012	10:53:28 AM	Helium valve closed
3/15/2012	10:53:28 AM	BCl3 valve closed
3/15/2012	10:53:28 AM	PH3 valve closed
3/15/2012	10:53:28 AM	SiCl4 pre valve closed
3/15/2012	10:53:28 AM	SiCl4 post valve closed
3/15/2012	10:53:28 AM	Main Vac valve closed
3/15/2012	10:53:28 AM	Bypass valve closed
3/15/2012	10:53:28 AM	H2 valve opened
3/15/2012	10:53:28 AM	Bubbler valve opened
3/15/2012	10:53:28 AM	Helium MFC set to  0.000000
3/15/2012	10:53:28 AM	H2 MFC set to  500.000000
3/15/2012	10:53:28 AM	BCl3 MFC set to  0.000000
3/15/2012	10:53:28 AM	PH3 MFC set to  0.000000
3/15/2012	10:53:28 AM	SiCl4 MFC set to  0.000000
3/15/2012	10:53:28 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:53:28 AM	Tube furnace set to 1000
3/15/2012	11:18:28 AM	Helium valve closed
3/15/2012	11:18:28 AM	PH3 valve closed
3/15/2012	11:18:28 AM	Main Vac valve closed
3/15/2012	11:18:28 AM	Bypass valve closed
3/15/2012	11:18:28 AM	H2 valve opened
3/15/2012	11:18:28 AM	BCl3 valve opened
3/15/2012	11:18:28 AM	SiCl4 pre valve opened
3/15/2012	11:18:28 AM	SiCl4 post valve opened
3/15/2012	11:18:28 AM	Bubbler valve opened
3/15/2012	11:18:28 AM	Helium MFC set to  0.000000
3/15/2012	11:18:28 AM	H2 MFC set to  450.000000
3/15/2012	11:18:28 AM	BCl3 MFC set to  1.500000
3/15/2012	11:18:28 AM	PH3 MFC set to  0.000000
3/15/2012	11:18:28 AM	SiCl4 MFC set to  50.000000
3/15/2012	11:18:28 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:18:29 AM	Tube furnace set to 1000
3/15/2012	11:39:29 AM	Helium valve closed
3/15/2012	11:39:29 AM	BCl3 valve closed
3/15/2012	11:39:29 AM	PH3 valve closed
3/15/2012	11:39:29 AM	SiCl4 pre valve closed
3/15/2012	11:39:29 AM	SiCl4 post valve closed
3/15/2012	11:39:29 AM	Main Vac valve closed
3/15/2012	11:39:29 AM	Bypass valve closed
3/15/2012	11:39:29 AM	H2 valve opened
3/15/2012	11:39:29 AM	Bubbler valve opened
3/15/2012	11:39:29 AM	Helium MFC set to  0.000000
3/15/2012	11:39:29 AM	H2 MFC set to  500.000000
3/15/2012	11:39:29 AM	BCl3 MFC set to  0.000000
3/15/2012	11:39:29 AM	PH3 MFC set to  0.000000
3/15/2012	11:39:29 AM	SiCl4 MFC set to  0.000000
3/15/2012	11:39:29 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:39:29 AM	Tube furnace set to 750
3/15/2012	11:54:29 AM	H2 valve closed
3/15/2012	11:54:29 AM	BCl3 valve closed
3/15/2012	11:54:29 AM	PH3 valve closed
3/15/2012	11:54:29 AM	SiCl4 pre valve closed
3/15/2012	11:54:29 AM	SiCl4 post valve closed
3/15/2012	11:54:29 AM	Main Vac valve closed
3/15/2012	11:54:29 AM	Bypass valve closed
3/15/2012	11:54:29 AM	Helium valve opened
3/15/2012	11:54:29 AM	Bubbler valve opened
3/15/2012	11:54:29 AM	Helium MFC set to  500.000000
3/15/2012	11:54:29 AM	H2 MFC set to  0.000000
3/15/2012	11:54:29 AM	BCl3 MFC set to  0.000000
3/15/2012	11:54:29 AM	PH3 MFC set to  0.000000
3/15/2012	11:54:29 AM	SiCl4 MFC set to  0.000000
3/15/2012	11:54:29 AM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:54:29 AM	Tube furnace set to 0
3/15/2012	12:14:29 PM	Helium valve closed
3/15/2012	12:14:29 PM	H2 valve closed
3/15/2012	12:14:29 PM	BCl3 valve closed
3/15/2012	12:14:29 PM	PH3 valve closed
3/15/2012	12:14:29 PM	SiCl4 pre valve closed
3/15/2012	12:14:29 PM	SiCl4 post valve closed
3/15/2012	12:14:29 PM	Main Vac valve closed
3/15/2012	12:14:29 PM	Bypass valve closed
3/15/2012	12:14:29 PM	Bubbler valve closed
3/15/2012	12:14:29 PM	Helium MFC set to  0.000000
3/15/2012	12:14:29 PM	H2 MFC set to  0.000000
3/15/2012	12:14:29 PM	BCl3 MFC set to  0.000000
3/15/2012	12:14:29 PM	PH3 MFC set to  0.000000
3/15/2012	12:14:29 PM	SiCl4 MFC set to  0.000000
3/15/2012	12:14:29 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	12:14:29 PM	Tube furnace set to 0
3/15/2012	12:34:29 PM	Helium valve closed
3/15/2012	12:34:29 PM	H2 valve closed
3/15/2012	12:34:29 PM	BCl3 valve closed
3/15/2012	12:34:29 PM	PH3 valve closed
3/15/2012	12:34:29 PM	SiCl4 pre valve closed
3/15/2012	12:34:29 PM	SiCl4 post valve closed
3/15/2012	12:34:29 PM	Main Vac valve closed
3/15/2012	12:34:29 PM	Bubbler valve closed
3/15/2012	12:34:29 PM	Bypass valve opened
3/15/2012	12:34:29 PM	Helium MFC set to  0.000000
3/15/2012	12:34:29 PM	H2 MFC set to  0.000000
3/15/2012	12:34:29 PM	BCl3 MFC set to  0.000000
3/15/2012	12:34:29 PM	PH3 MFC set to  0.000000
3/15/2012	12:34:29 PM	SiCl4 MFC set to  0.000000
3/15/2012	12:34:29 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	12:34:29 PM	Tube furnace set to 0
3/15/2012	12:35:16 PM	Helium valve closed
3/15/2012	12:35:16 PM	H2 valve closed
3/15/2012	12:35:16 PM	BCl3 valve closed
3/15/2012	12:35:16 PM	PH3 valve closed
3/15/2012	12:35:16 PM	SiCl4 pre valve closed
3/15/2012	12:35:16 PM	SiCl4 post valve closed
3/15/2012	12:35:16 PM	Main Vac valve closed
3/15/2012	12:35:16 PM	Bubbler valve closed
3/15/2012	12:35:16 PM	Bypass valve opened
3/15/2012	12:35:16 PM	Helium MFC set to  0.000000
3/15/2012	12:35:16 PM	H2 MFC set to  0.000000
3/15/2012	12:35:16 PM	BCl3 MFC set to  0.000000
3/15/2012	12:35:16 PM	PH3 MFC set to  0.000000
3/15/2012	12:35:16 PM	SiCl4 MFC set to  0.000000
3/15/2012	12:35:16 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	12:35:16 PM	Tube furnace set to 0
3/15/2012	12:36:16 PM	Helium valve closed
3/15/2012	12:36:16 PM	H2 valve closed
3/15/2012	12:36:16 PM	BCl3 valve closed
3/15/2012	12:36:16 PM	PH3 valve closed
3/15/2012	12:36:16 PM	SiCl4 pre valve closed
3/15/2012	12:36:16 PM	SiCl4 post valve closed
3/15/2012	12:36:16 PM	Bypass valve closed
3/15/2012	12:36:16 PM	Bubbler valve closed
3/15/2012	12:36:16 PM	Main Vac valve opened
3/15/2012	12:36:16 PM	Helium MFC set to  0.000000
3/15/2012	12:36:16 PM	H2 MFC set to  0.000000
3/15/2012	12:36:16 PM	BCl3 MFC set to  0.000000
3/15/2012	12:36:16 PM	PH3 MFC set to  0.000000
3/15/2012	12:36:16 PM	SiCl4 MFC set to  0.000000
3/15/2012	12:36:16 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	12:36:16 PM	Tube furnace set to 0
3/15/2012	1:36:16 PM	Run finished at 1:36 PM
3/15/2012	2:15:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	2:15:01 PM	Recipe started at 2:15 PM
3/15/2012	2:15:01 PM	Helium valve closed
3/15/2012	2:15:01 PM	H2 valve closed
3/15/2012	2:15:01 PM	BCl3 valve closed
3/15/2012	2:15:01 PM	PH3 valve closed
3/15/2012	2:15:01 PM	SiCl4 pre valve closed
3/15/2012	2:15:01 PM	SiCl4 post valve closed
3/15/2012	2:15:01 PM	Main Vac valve closed
3/15/2012	2:15:01 PM	Bypass valve closed
3/15/2012	2:15:01 PM	Bubbler valve closed
3/15/2012	2:15:01 PM	Helium MFC set to  0.000000
3/15/2012	2:15:01 PM	H2 MFC set to  0.000000
3/15/2012	2:15:01 PM	BCl3 MFC set to  0.000000
3/15/2012	2:15:01 PM	PH3 MFC set to  0.000000
3/15/2012	2:15:01 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:15:01 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:15:01 PM	Tube furnace set to 0
3/15/2012	2:15:04 PM	H2 valve closed
3/15/2012	2:15:04 PM	BCl3 valve closed
3/15/2012	2:15:04 PM	PH3 valve closed
3/15/2012	2:15:04 PM	SiCl4 pre valve closed
3/15/2012	2:15:04 PM	SiCl4 post valve closed
3/15/2012	2:15:04 PM	Main Vac valve closed
3/15/2012	2:15:04 PM	Bypass valve closed
3/15/2012	2:15:04 PM	Bubbler valve closed
3/15/2012	2:15:04 PM	Helium valve opened
3/15/2012	2:15:04 PM	Helium MFC set to  500.000000
3/15/2012	2:15:04 PM	H2 MFC set to  0.000000
3/15/2012	2:15:04 PM	BCl3 MFC set to  0.000000
3/15/2012	2:15:04 PM	PH3 MFC set to  0.000000
3/15/2012	2:15:04 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:15:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:15:04 PM	Tube furnace set to 0
3/15/2012	2:16:06 PM	Helium valve closed
3/15/2012	2:16:06 PM	H2 valve closed
3/15/2012	2:16:06 PM	BCl3 valve closed
3/15/2012	2:16:06 PM	PH3 valve closed
3/15/2012	2:16:06 PM	SiCl4 pre valve closed
3/15/2012	2:16:07 PM	SiCl4 post valve closed
3/15/2012	2:16:07 PM	Main Vac valve closed
3/15/2012	2:16:07 PM	Bypass valve closed
3/15/2012	2:16:07 PM	Bubbler valve closed
3/15/2012	2:16:07 PM	Helium MFC set to  0.000000
3/15/2012	2:16:07 PM	H2 MFC set to  0.000000
3/15/2012	2:16:07 PM	BCl3 MFC set to  0.000000
3/15/2012	2:16:07 PM	PH3 MFC set to  0.000000
3/15/2012	2:16:07 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:16:07 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:16:07 PM	Tube furnace set to 0
3/15/2012	2:16:08 PM	Run finished at 2:16 PM
3/15/2012	2:16:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	2:22:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	2:22:08 PM	Recipe started at 2:22 PM
3/15/2012	2:22:08 PM	Helium valve closed
3/15/2012	2:22:08 PM	H2 valve closed
3/15/2012	2:22:08 PM	BCl3 valve closed
3/15/2012	2:22:08 PM	PH3 valve closed
3/15/2012	2:22:08 PM	SiCl4 pre valve closed
3/15/2012	2:22:08 PM	SiCl4 post valve closed
3/15/2012	2:22:08 PM	Main Vac valve closed
3/15/2012	2:22:08 PM	Bubbler valve closed
3/15/2012	2:22:08 PM	Bypass valve opened
3/15/2012	2:22:08 PM	Helium MFC set to  0.000000
3/15/2012	2:22:08 PM	H2 MFC set to  0.000000
3/15/2012	2:22:08 PM	BCl3 MFC set to  0.000000
3/15/2012	2:22:08 PM	PH3 MFC set to  0.000000
3/15/2012	2:22:08 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:22:08 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:22:08 PM	Tube furnace set to 0
3/15/2012	2:23:13 PM	Helium valve closed
3/15/2012	2:23:13 PM	H2 valve closed
3/15/2012	2:23:13 PM	BCl3 valve closed
3/15/2012	2:23:13 PM	PH3 valve closed
3/15/2012	2:23:13 PM	SiCl4 pre valve closed
3/15/2012	2:23:13 PM	SiCl4 post valve closed
3/15/2012	2:23:13 PM	Main Vac valve closed
3/15/2012	2:23:13 PM	Bubbler valve closed
3/15/2012	2:23:13 PM	Bypass valve opened
3/15/2012	2:23:13 PM	Helium MFC set to  0.000000
3/15/2012	2:23:13 PM	H2 MFC set to  0.000000
3/15/2012	2:23:13 PM	BCl3 MFC set to  0.000000
3/15/2012	2:23:13 PM	PH3 MFC set to  0.000000
3/15/2012	2:23:13 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:23:13 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:23:13 PM	Tube furnace set to 0
3/15/2012	2:24:13 PM	Helium valve closed
3/15/2012	2:24:13 PM	H2 valve closed
3/15/2012	2:24:13 PM	BCl3 valve closed
3/15/2012	2:24:13 PM	PH3 valve closed
3/15/2012	2:24:13 PM	SiCl4 pre valve closed
3/15/2012	2:24:13 PM	SiCl4 post valve closed
3/15/2012	2:24:13 PM	Bypass valve closed
3/15/2012	2:24:13 PM	Bubbler valve closed
3/15/2012	2:24:13 PM	Main Vac valve opened
3/15/2012	2:24:13 PM	Helium MFC set to  0.000000
3/15/2012	2:24:13 PM	H2 MFC set to  0.000000
3/15/2012	2:24:13 PM	BCl3 MFC set to  0.000000
3/15/2012	2:24:13 PM	PH3 MFC set to  0.000000
3/15/2012	2:24:13 PM	SiCl4 MFC set to  0.000000
3/15/2012	2:24:13 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	2:24:13 PM	Tube furnace set to 0
3/15/2012	2:24:14 PM	Run finished at 2:24 PM
3/15/2012	2:24:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	5:16:37 PM	Recipe started at 5:16 PM
3/15/2012	5:16:37 PM	Helium valve closed
3/15/2012	5:16:37 PM	H2 valve closed
3/15/2012	5:16:37 PM	BCl3 valve closed
3/15/2012	5:16:37 PM	PH3 valve closed
3/15/2012	5:16:37 PM	SiCl4 pre valve closed
3/15/2012	5:16:37 PM	SiCl4 post valve closed
3/15/2012	5:16:37 PM	Bypass valve closed
3/15/2012	5:16:37 PM	Bubbler valve closed
3/15/2012	5:16:37 PM	Main Vac valve opened
3/15/2012	5:16:37 PM	Helium MFC set to  0.000000
3/15/2012	5:16:37 PM	H2 MFC set to  0.000000
3/15/2012	5:16:37 PM	BCl3 MFC set to  0.000000
3/15/2012	5:16:37 PM	PH3 MFC set to  0.000000
3/15/2012	5:16:37 PM	SiCl4 MFC set to  0.000000
3/15/2012	5:16:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:16:38 PM	Tube furnace set to 0
3/15/2012	5:17:38 PM	Helium valve closed
3/15/2012	5:17:38 PM	H2 valve closed
3/15/2012	5:17:38 PM	BCl3 valve closed
3/15/2012	5:17:38 PM	PH3 valve closed
3/15/2012	5:17:38 PM	SiCl4 pre valve closed
3/15/2012	5:17:38 PM	SiCl4 post valve closed
3/15/2012	5:17:38 PM	Main Vac valve closed
3/15/2012	5:17:38 PM	Bypass valve closed
3/15/2012	5:17:38 PM	Bubbler valve closed
3/15/2012	5:17:38 PM	Helium MFC set to  0.000000
3/15/2012	5:17:38 PM	H2 MFC set to  0.000000
3/15/2012	5:17:38 PM	BCl3 MFC set to  0.000000
3/15/2012	5:17:38 PM	PH3 MFC set to  0.000000
3/15/2012	5:17:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	5:17:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:17:38 PM	Tube furnace set to 0
3/15/2012	5:17:41 PM	Helium valve closed
3/15/2012	5:17:41 PM	BCl3 valve closed
3/15/2012	5:17:41 PM	PH3 valve closed
3/15/2012	5:17:41 PM	SiCl4 pre valve closed
3/15/2012	5:17:41 PM	SiCl4 post valve closed
3/15/2012	5:17:41 PM	Main Vac valve closed
3/15/2012	5:17:41 PM	Bypass valve closed
3/15/2012	5:17:41 PM	Bubbler valve closed
3/15/2012	5:17:41 PM	H2 valve opened
3/15/2012	5:17:41 PM	Helium MFC set to  0.000000
3/15/2012	5:17:41 PM	H2 MFC set to  500.000000
3/15/2012	5:17:41 PM	BCl3 MFC set to  0.000000
3/15/2012	5:17:41 PM	PH3 MFC set to  0.000000
3/15/2012	5:17:41 PM	SiCl4 MFC set to  0.000000
3/15/2012	5:17:41 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:17:41 PM	Tube furnace set to 0
3/15/2012	5:18:48 PM	Helium valve closed
3/15/2012	5:18:48 PM	BCl3 valve closed
3/15/2012	5:18:48 PM	PH3 valve closed
3/15/2012	5:18:48 PM	SiCl4 pre valve closed
3/15/2012	5:18:48 PM	SiCl4 post valve closed
3/15/2012	5:18:48 PM	Main Vac valve closed
3/15/2012	5:18:48 PM	Bypass valve closed
3/15/2012	5:18:48 PM	H2 valve opened
3/15/2012	5:18:48 PM	Bubbler valve opened
3/15/2012	5:18:48 PM	Helium MFC set to  0.000000
3/15/2012	5:18:48 PM	H2 MFC set to  500.000000
3/15/2012	5:18:48 PM	BCl3 MFC set to  0.000000
3/15/2012	5:18:48 PM	PH3 MFC set to  0.000000
3/15/2012	5:18:48 PM	SiCl4 MFC set to  0.000000
3/15/2012	5:18:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:18:48 PM	Tube furnace set to 0
3/15/2012	5:18:49 PM	Helium valve closed
3/15/2012	5:18:49 PM	BCl3 valve closed
3/15/2012	5:18:49 PM	PH3 valve closed
3/15/2012	5:18:49 PM	SiCl4 pre valve closed
3/15/2012	5:18:49 PM	SiCl4 post valve closed
3/15/2012	5:18:49 PM	Main Vac valve closed
3/15/2012	5:18:49 PM	Bypass valve closed
3/15/2012	5:18:49 PM	H2 valve opened
3/15/2012	5:18:49 PM	Bubbler valve opened
3/15/2012	5:18:49 PM	Helium MFC set to  0.000000
3/15/2012	5:18:49 PM	H2 MFC set to  500.000000
3/15/2012	5:18:49 PM	BCl3 MFC set to  0.000000
3/15/2012	5:18:49 PM	PH3 MFC set to  0.000000
3/15/2012	5:18:49 PM	SiCl4 MFC set to  0.000000
3/15/2012	5:18:49 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:18:49 PM	Tube furnace set to 1000
3/15/2012	5:43:49 PM	Helium valve closed
3/15/2012	5:43:49 PM	PH3 valve closed
3/15/2012	5:43:49 PM	Main Vac valve closed
3/15/2012	5:43:49 PM	Bypass valve closed
3/15/2012	5:43:49 PM	H2 valve opened
3/15/2012	5:43:49 PM	BCl3 valve opened
3/15/2012	5:43:49 PM	SiCl4 pre valve opened
3/15/2012	5:43:49 PM	SiCl4 post valve opened
3/15/2012	5:43:49 PM	Bubbler valve opened
3/15/2012	5:43:49 PM	Helium MFC set to  0.000000
3/15/2012	5:43:49 PM	H2 MFC set to  450.000000
3/15/2012	5:43:49 PM	BCl3 MFC set to  1.500000
3/15/2012	5:43:49 PM	PH3 MFC set to  0.000000
3/15/2012	5:43:49 PM	SiCl4 MFC set to  50.000000
3/15/2012	5:43:49 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	5:43:50 PM	Tube furnace set to 1000
3/15/2012	6:04:49 PM	Helium valve closed
3/15/2012	6:04:49 PM	BCl3 valve closed
3/15/2012	6:04:49 PM	PH3 valve closed
3/15/2012	6:04:49 PM	SiCl4 pre valve closed
3/15/2012	6:04:50 PM	SiCl4 post valve closed
3/15/2012	6:04:50 PM	Main Vac valve closed
3/15/2012	6:04:50 PM	Bypass valve closed
3/15/2012	6:04:50 PM	H2 valve opened
3/15/2012	6:04:50 PM	Bubbler valve opened
3/15/2012	6:04:50 PM	Helium MFC set to  0.000000
3/15/2012	6:04:50 PM	H2 MFC set to  500.000000
3/15/2012	6:04:50 PM	BCl3 MFC set to  0.000000
3/15/2012	6:04:50 PM	PH3 MFC set to  0.000000
3/15/2012	6:04:50 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:04:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:04:50 PM	Tube furnace set to 750
3/15/2012	6:19:50 PM	H2 valve closed
3/15/2012	6:19:50 PM	BCl3 valve closed
3/15/2012	6:19:50 PM	PH3 valve closed
3/15/2012	6:19:50 PM	SiCl4 pre valve closed
3/15/2012	6:19:50 PM	SiCl4 post valve closed
3/15/2012	6:19:50 PM	Main Vac valve closed
3/15/2012	6:19:50 PM	Bypass valve closed
3/15/2012	6:19:50 PM	Helium valve opened
3/15/2012	6:19:50 PM	Bubbler valve opened
3/15/2012	6:19:50 PM	Helium MFC set to  500.000000
3/15/2012	6:19:50 PM	H2 MFC set to  0.000000
3/15/2012	6:19:50 PM	BCl3 MFC set to  0.000000
3/15/2012	6:19:50 PM	PH3 MFC set to  0.000000
3/15/2012	6:19:50 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:19:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:19:50 PM	Tube furnace set to 0
3/15/2012	6:39:50 PM	Helium valve closed
3/15/2012	6:39:50 PM	H2 valve closed
3/15/2012	6:39:50 PM	BCl3 valve closed
3/15/2012	6:39:50 PM	PH3 valve closed
3/15/2012	6:39:50 PM	SiCl4 pre valve closed
3/15/2012	6:39:50 PM	SiCl4 post valve closed
3/15/2012	6:39:50 PM	Main Vac valve closed
3/15/2012	6:39:50 PM	Bypass valve closed
3/15/2012	6:39:50 PM	Bubbler valve closed
3/15/2012	6:39:50 PM	Helium MFC set to  0.000000
3/15/2012	6:39:50 PM	H2 MFC set to  0.000000
3/15/2012	6:39:50 PM	BCl3 MFC set to  0.000000
3/15/2012	6:39:50 PM	PH3 MFC set to  0.000000
3/15/2012	6:39:50 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:39:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:39:50 PM	Tube furnace set to 0
3/15/2012	6:39:59 PM	Run aborted at 6:39 PM
3/15/2012	6:39:59 PM	Helium valve closed
3/15/2012	6:39:59 PM	H2 valve closed
3/15/2012	6:39:59 PM	BCl3 valve closed
3/15/2012	6:39:59 PM	PH3 valve closed
3/15/2012	6:39:59 PM	SiCl4 pre valve closed
3/15/2012	6:39:59 PM	SiCl4 post valve closed
3/15/2012	6:39:59 PM	Bypass valve closed
3/15/2012	6:39:59 PM	Main Vac valve closed
3/15/2012	6:39:59 PM	Bubbler valve closed
3/15/2012	6:39:59 PM	Helium MFC set to  0.000000
3/15/2012	6:39:59 PM	H2 MFC set to  0.000000
3/15/2012	6:39:59 PM	BCl3 MFC set to  0.000000
3/15/2012	6:40:00 PM	PH3 MFC set to  0.000000
3/15/2012	6:40:00 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:40:00 PM	Tube furnace set to 0
3/15/2012	6:49:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	6:49:02 PM	Recipe started at 6:49 PM
3/15/2012	6:49:02 PM	Helium valve closed
3/15/2012	6:49:02 PM	H2 valve closed
3/15/2012	6:49:02 PM	BCl3 valve closed
3/15/2012	6:49:02 PM	PH3 valve closed
3/15/2012	6:49:02 PM	SiCl4 pre valve closed
3/15/2012	6:49:02 PM	SiCl4 post valve closed
3/15/2012	6:49:02 PM	Main Vac valve closed
3/15/2012	6:49:02 PM	Bypass valve closed
3/15/2012	6:49:02 PM	Bubbler valve closed
3/15/2012	6:49:02 PM	Helium MFC set to  0.000000
3/15/2012	6:49:02 PM	H2 MFC set to  0.000000
3/15/2012	6:49:02 PM	BCl3 MFC set to  0.000000
3/15/2012	6:49:02 PM	PH3 MFC set to  0.000000
3/15/2012	6:49:02 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:49:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:49:02 PM	Tube furnace set to 0
3/15/2012	6:49:05 PM	H2 valve closed
3/15/2012	6:49:05 PM	BCl3 valve closed
3/15/2012	6:49:05 PM	PH3 valve closed
3/15/2012	6:49:05 PM	SiCl4 pre valve closed
3/15/2012	6:49:05 PM	SiCl4 post valve closed
3/15/2012	6:49:05 PM	Main Vac valve closed
3/15/2012	6:49:05 PM	Bypass valve closed
3/15/2012	6:49:05 PM	Bubbler valve closed
3/15/2012	6:49:05 PM	Helium valve opened
3/15/2012	6:49:05 PM	Helium MFC set to  500.000000
3/15/2012	6:49:05 PM	H2 MFC set to  0.000000
3/15/2012	6:49:06 PM	BCl3 MFC set to  0.000000
3/15/2012	6:49:06 PM	PH3 MFC set to  0.000000
3/15/2012	6:49:06 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:49:06 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:49:06 PM	Tube furnace set to 0
3/15/2012	6:49:10 PM	Helium valve closed
3/15/2012	6:49:10 PM	H2 valve closed
3/15/2012	6:49:10 PM	BCl3 valve closed
3/15/2012	6:49:10 PM	PH3 valve closed
3/15/2012	6:49:10 PM	SiCl4 pre valve closed
3/15/2012	6:49:10 PM	SiCl4 post valve closed
3/15/2012	6:49:10 PM	Main Vac valve closed
3/15/2012	6:49:10 PM	Bypass valve closed
3/15/2012	6:49:10 PM	Bubbler valve closed
3/15/2012	6:49:10 PM	Helium MFC set to  0.000000
3/15/2012	6:49:10 PM	H2 MFC set to  0.000000
3/15/2012	6:49:10 PM	BCl3 MFC set to  0.000000
3/15/2012	6:49:10 PM	PH3 MFC set to  0.000000
3/15/2012	6:49:10 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:49:10 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:49:10 PM	Tube furnace set to 0
3/15/2012	6:49:11 PM	Run finished at 6:49 PM
3/15/2012	6:49:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	6:52:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	6:52:42 PM	Recipe started at 6:52 PM
3/15/2012	6:52:42 PM	Helium valve closed
3/15/2012	6:52:42 PM	H2 valve closed
3/15/2012	6:52:42 PM	BCl3 valve closed
3/15/2012	6:52:42 PM	PH3 valve closed
3/15/2012	6:52:42 PM	SiCl4 pre valve closed
3/15/2012	6:52:42 PM	SiCl4 post valve closed
3/15/2012	6:52:42 PM	Main Vac valve closed
3/15/2012	6:52:42 PM	Bypass valve closed
3/15/2012	6:52:42 PM	Bubbler valve closed
3/15/2012	6:52:42 PM	Helium MFC set to  0.000000
3/15/2012	6:52:42 PM	H2 MFC set to  0.000000
3/15/2012	6:52:42 PM	BCl3 MFC set to  0.000000
3/15/2012	6:52:42 PM	PH3 MFC set to  0.000000
3/15/2012	6:52:42 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:52:42 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:52:42 PM	Tube furnace set to 0
3/15/2012	6:52:45 PM	H2 valve closed
3/15/2012	6:52:45 PM	BCl3 valve closed
3/15/2012	6:52:45 PM	PH3 valve closed
3/15/2012	6:52:45 PM	SiCl4 pre valve closed
3/15/2012	6:52:45 PM	SiCl4 post valve closed
3/15/2012	6:52:45 PM	Main Vac valve closed
3/15/2012	6:52:45 PM	Bypass valve closed
3/15/2012	6:52:45 PM	Bubbler valve closed
3/15/2012	6:52:45 PM	Helium valve opened
3/15/2012	6:52:45 PM	Helium MFC set to  500.000000
3/15/2012	6:52:45 PM	H2 MFC set to  0.000000
3/15/2012	6:52:45 PM	BCl3 MFC set to  0.000000
3/15/2012	6:52:45 PM	PH3 MFC set to  0.000000
3/15/2012	6:52:45 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:52:45 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:52:45 PM	Tube furnace set to 0
3/15/2012	6:52:45 PM	Helium valve closed
3/15/2012	6:52:45 PM	H2 valve closed
3/15/2012	6:52:45 PM	BCl3 valve closed
3/15/2012	6:52:45 PM	PH3 valve closed
3/15/2012	6:52:45 PM	SiCl4 pre valve closed
3/15/2012	6:52:45 PM	SiCl4 post valve closed
3/15/2012	6:52:45 PM	Main Vac valve closed
3/15/2012	6:52:45 PM	Bypass valve closed
3/15/2012	6:52:45 PM	Bubbler valve closed
3/15/2012	6:52:45 PM	Helium MFC set to  0.000000
3/15/2012	6:52:45 PM	H2 MFC set to  0.000000
3/15/2012	6:52:45 PM	BCl3 MFC set to  0.000000
3/15/2012	6:52:45 PM	PH3 MFC set to  0.000000
3/15/2012	6:52:45 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:52:45 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:52:46 PM	Tube furnace set to 0
3/15/2012	6:52:47 PM	Run finished at 6:52 PM
3/15/2012	6:52:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	6:55:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	6:55:47 PM	Recipe started at 6:55 PM
3/15/2012	6:55:47 PM	Helium valve closed
3/15/2012	6:55:48 PM	H2 valve closed
3/15/2012	6:55:48 PM	BCl3 valve closed
3/15/2012	6:55:48 PM	PH3 valve closed
3/15/2012	6:55:48 PM	SiCl4 pre valve closed
3/15/2012	6:55:48 PM	SiCl4 post valve closed
3/15/2012	6:55:48 PM	Main Vac valve closed
3/15/2012	6:55:48 PM	Bubbler valve closed
3/15/2012	6:55:48 PM	Bypass valve opened
3/15/2012	6:55:48 PM	Helium MFC set to  0.000000
3/15/2012	6:55:48 PM	H2 MFC set to  0.000000
3/15/2012	6:55:48 PM	BCl3 MFC set to  0.000000
3/15/2012	6:55:48 PM	PH3 MFC set to  0.000000
3/15/2012	6:55:48 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:55:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:55:48 PM	Tube furnace set to 0
3/15/2012	6:56:46 PM	Helium valve closed
3/15/2012	6:56:46 PM	H2 valve closed
3/15/2012	6:56:46 PM	BCl3 valve closed
3/15/2012	6:56:46 PM	PH3 valve closed
3/15/2012	6:56:46 PM	SiCl4 pre valve closed
3/15/2012	6:56:46 PM	SiCl4 post valve closed
3/15/2012	6:56:46 PM	Main Vac valve closed
3/15/2012	6:56:46 PM	Bubbler valve closed
3/15/2012	6:56:46 PM	Bypass valve opened
3/15/2012	6:56:46 PM	Helium MFC set to  0.000000
3/15/2012	6:56:46 PM	H2 MFC set to  0.000000
3/15/2012	6:56:46 PM	BCl3 MFC set to  0.000000
3/15/2012	6:56:46 PM	PH3 MFC set to  0.000000
3/15/2012	6:56:46 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:56:46 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:56:47 PM	Tube furnace set to 0
3/15/2012	6:57:47 PM	Helium valve closed
3/15/2012	6:57:47 PM	H2 valve closed
3/15/2012	6:57:47 PM	BCl3 valve closed
3/15/2012	6:57:47 PM	PH3 valve closed
3/15/2012	6:57:47 PM	SiCl4 pre valve closed
3/15/2012	6:57:47 PM	SiCl4 post valve closed
3/15/2012	6:57:47 PM	Bypass valve closed
3/15/2012	6:57:47 PM	Bubbler valve closed
3/15/2012	6:57:47 PM	Main Vac valve opened
3/15/2012	6:57:47 PM	Helium MFC set to  0.000000
3/15/2012	6:57:47 PM	H2 MFC set to  0.000000
3/15/2012	6:57:47 PM	BCl3 MFC set to  0.000000
3/15/2012	6:57:47 PM	PH3 MFC set to  0.000000
3/15/2012	6:57:47 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:57:47 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:57:47 PM	Tube furnace set to 0
3/15/2012	6:57:48 PM	Run finished at 6:57 PM
3/15/2012	6:57:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	6:58:28 PM	Recipe started at 6:58 PM
3/15/2012	6:58:28 PM	Helium valve closed
3/15/2012	6:58:28 PM	H2 valve closed
3/15/2012	6:58:28 PM	BCl3 valve closed
3/15/2012	6:58:28 PM	PH3 valve closed
3/15/2012	6:58:28 PM	SiCl4 pre valve closed
3/15/2012	6:58:28 PM	SiCl4 post valve closed
3/15/2012	6:58:28 PM	Bypass valve closed
3/15/2012	6:58:28 PM	Bubbler valve closed
3/15/2012	6:58:28 PM	Main Vac valve opened
3/15/2012	6:58:28 PM	Helium MFC set to  0.000000
3/15/2012	6:58:28 PM	H2 MFC set to  0.000000
3/15/2012	6:58:28 PM	BCl3 MFC set to  0.000000
3/15/2012	6:58:28 PM	PH3 MFC set to  0.000000
3/15/2012	6:58:28 PM	SiCl4 MFC set to  0.000000
3/15/2012	6:58:28 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	6:58:28 PM	Tube furnace set to 0
3/15/2012	8:28:28 PM	Helium valve closed
3/15/2012	8:28:28 PM	H2 valve closed
3/15/2012	8:28:28 PM	BCl3 valve closed
3/15/2012	8:28:28 PM	PH3 valve closed
3/15/2012	8:28:28 PM	SiCl4 pre valve closed
3/15/2012	8:28:28 PM	SiCl4 post valve closed
3/15/2012	8:28:28 PM	Main Vac valve closed
3/15/2012	8:28:28 PM	Bypass valve closed
3/15/2012	8:28:28 PM	Bubbler valve closed
3/15/2012	8:28:28 PM	Helium MFC set to  0.000000
3/15/2012	8:28:28 PM	H2 MFC set to  0.000000
3/15/2012	8:28:28 PM	BCl3 MFC set to  0.000000
3/15/2012	8:28:28 PM	PH3 MFC set to  0.000000
3/15/2012	8:28:28 PM	SiCl4 MFC set to  0.000000
3/15/2012	8:28:28 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	8:28:28 PM	Tube furnace set to 0
3/15/2012	8:28:31 PM	Helium valve closed
3/15/2012	8:28:31 PM	BCl3 valve closed
3/15/2012	8:28:31 PM	PH3 valve closed
3/15/2012	8:28:31 PM	SiCl4 pre valve closed
3/15/2012	8:28:31 PM	SiCl4 post valve closed
3/15/2012	8:28:31 PM	Main Vac valve closed
3/15/2012	8:28:31 PM	Bypass valve closed
3/15/2012	8:28:31 PM	Bubbler valve closed
3/15/2012	8:28:31 PM	H2 valve opened
3/15/2012	8:28:31 PM	Helium MFC set to  0.000000
3/15/2012	8:28:31 PM	H2 MFC set to  500.000000
3/15/2012	8:28:31 PM	BCl3 MFC set to  0.000000
3/15/2012	8:28:31 PM	PH3 MFC set to  0.000000
3/15/2012	8:28:31 PM	SiCl4 MFC set to  0.000000
3/15/2012	8:28:31 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	8:28:31 PM	Tube furnace set to 0
3/15/2012	8:29:36 PM	Helium valve closed
3/15/2012	8:29:36 PM	BCl3 valve closed
3/15/2012	8:29:36 PM	PH3 valve closed
3/15/2012	8:29:36 PM	SiCl4 pre valve closed
3/15/2012	8:29:36 PM	SiCl4 post valve closed
3/15/2012	8:29:36 PM	Main Vac valve closed
3/15/2012	8:29:36 PM	Bypass valve closed
3/15/2012	8:29:36 PM	H2 valve opened
3/15/2012	8:29:36 PM	Bubbler valve opened
3/15/2012	8:29:36 PM	Helium MFC set to  0.000000
3/15/2012	8:29:36 PM	H2 MFC set to  500.000000
3/15/2012	8:29:36 PM	BCl3 MFC set to  0.000000
3/15/2012	8:29:36 PM	PH3 MFC set to  0.000000
3/15/2012	8:29:36 PM	SiCl4 MFC set to  0.000000
3/15/2012	8:29:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	8:29:36 PM	Tube furnace set to 0
3/15/2012	8:29:38 PM	Helium valve closed
3/15/2012	8:29:38 PM	BCl3 valve closed
3/15/2012	8:29:38 PM	PH3 valve closed
3/15/2012	8:29:38 PM	SiCl4 pre valve closed
3/15/2012	8:29:38 PM	SiCl4 post valve closed
3/15/2012	8:29:38 PM	Main Vac valve closed
3/15/2012	8:29:38 PM	Bypass valve closed
3/15/2012	8:29:38 PM	H2 valve opened
3/15/2012	8:29:38 PM	Bubbler valve opened
3/15/2012	8:29:38 PM	Helium MFC set to  0.000000
3/15/2012	8:29:38 PM	H2 MFC set to  500.000000
3/15/2012	8:29:38 PM	BCl3 MFC set to  0.000000
3/15/2012	8:29:38 PM	PH3 MFC set to  0.000000
3/15/2012	8:29:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	8:29:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	8:29:38 PM	Tube furnace set to 1000
3/15/2012	8:54:38 PM	Helium valve closed
3/15/2012	8:54:38 PM	PH3 valve closed
3/15/2012	8:54:38 PM	Main Vac valve closed
3/15/2012	8:54:38 PM	Bypass valve closed
3/15/2012	8:54:38 PM	H2 valve opened
3/15/2012	8:54:38 PM	BCl3 valve opened
3/15/2012	8:54:38 PM	SiCl4 pre valve opened
3/15/2012	8:54:38 PM	SiCl4 post valve opened
3/15/2012	8:54:38 PM	Bubbler valve opened
3/15/2012	8:54:38 PM	Helium MFC set to  0.000000
3/15/2012	8:54:38 PM	H2 MFC set to  450.000000
3/15/2012	8:54:38 PM	BCl3 MFC set to  1.500000
3/15/2012	8:54:38 PM	PH3 MFC set to  0.000000
3/15/2012	8:54:38 PM	SiCl4 MFC set to  50.000000
3/15/2012	8:54:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	8:54:38 PM	Tube furnace set to 1000
3/15/2012	9:15:38 PM	Helium valve closed
3/15/2012	9:15:38 PM	BCl3 valve closed
3/15/2012	9:15:38 PM	PH3 valve closed
3/15/2012	9:15:38 PM	SiCl4 pre valve closed
3/15/2012	9:15:38 PM	SiCl4 post valve closed
3/15/2012	9:15:38 PM	Main Vac valve closed
3/15/2012	9:15:38 PM	Bypass valve closed
3/15/2012	9:15:38 PM	H2 valve opened
3/15/2012	9:15:38 PM	Bubbler valve opened
3/15/2012	9:15:38 PM	Helium MFC set to  0.000000
3/15/2012	9:15:38 PM	H2 MFC set to  500.000000
3/15/2012	9:15:38 PM	BCl3 MFC set to  0.000000
3/15/2012	9:15:38 PM	PH3 MFC set to  0.000000
3/15/2012	9:15:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	9:15:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:15:38 PM	Tube furnace set to 750
3/15/2012	9:30:38 PM	H2 valve closed
3/15/2012	9:30:38 PM	BCl3 valve closed
3/15/2012	9:30:38 PM	PH3 valve closed
3/15/2012	9:30:38 PM	SiCl4 pre valve closed
3/15/2012	9:30:38 PM	SiCl4 post valve closed
3/15/2012	9:30:38 PM	Main Vac valve closed
3/15/2012	9:30:38 PM	Bypass valve closed
3/15/2012	9:30:38 PM	Helium valve opened
3/15/2012	9:30:38 PM	Bubbler valve opened
3/15/2012	9:30:38 PM	Helium MFC set to  500.000000
3/15/2012	9:30:38 PM	H2 MFC set to  0.000000
3/15/2012	9:30:38 PM	BCl3 MFC set to  0.000000
3/15/2012	9:30:38 PM	PH3 MFC set to  0.000000
3/15/2012	9:30:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	9:30:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:30:38 PM	Tube furnace set to 0
3/15/2012	9:50:38 PM	Helium valve closed
3/15/2012	9:50:38 PM	H2 valve closed
3/15/2012	9:50:38 PM	BCl3 valve closed
3/15/2012	9:50:38 PM	PH3 valve closed
3/15/2012	9:50:38 PM	SiCl4 pre valve closed
3/15/2012	9:50:38 PM	SiCl4 post valve closed
3/15/2012	9:50:38 PM	Main Vac valve closed
3/15/2012	9:50:38 PM	Bypass valve closed
3/15/2012	9:50:38 PM	Bubbler valve closed
3/15/2012	9:50:38 PM	Helium MFC set to  0.000000
3/15/2012	9:50:38 PM	H2 MFC set to  0.000000
3/15/2012	9:50:38 PM	BCl3 MFC set to  0.000000
3/15/2012	9:50:38 PM	PH3 MFC set to  0.000000
3/15/2012	9:50:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	9:50:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	9:50:38 PM	Tube furnace set to 0
3/15/2012	10:10:38 PM	Helium valve closed
3/15/2012	10:10:38 PM	H2 valve closed
3/15/2012	10:10:38 PM	BCl3 valve closed
3/15/2012	10:10:38 PM	PH3 valve closed
3/15/2012	10:10:38 PM	SiCl4 pre valve closed
3/15/2012	10:10:38 PM	SiCl4 post valve closed
3/15/2012	10:10:38 PM	Main Vac valve closed
3/15/2012	10:10:38 PM	Bubbler valve closed
3/15/2012	10:10:38 PM	Bypass valve opened
3/15/2012	10:10:38 PM	Helium MFC set to  0.000000
3/15/2012	10:10:38 PM	H2 MFC set to  0.000000
3/15/2012	10:10:38 PM	BCl3 MFC set to  0.000000
3/15/2012	10:10:38 PM	PH3 MFC set to  0.000000
3/15/2012	10:10:38 PM	SiCl4 MFC set to  0.000000
3/15/2012	10:10:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:10:39 PM	Tube furnace set to 0
3/15/2012	10:11:24 PM	Helium valve closed
3/15/2012	10:11:24 PM	H2 valve closed
3/15/2012	10:11:24 PM	BCl3 valve closed
3/15/2012	10:11:24 PM	PH3 valve closed
3/15/2012	10:11:24 PM	SiCl4 pre valve closed
3/15/2012	10:11:24 PM	SiCl4 post valve closed
3/15/2012	10:11:24 PM	Main Vac valve closed
3/15/2012	10:11:24 PM	Bubbler valve closed
3/15/2012	10:11:24 PM	Bypass valve opened
3/15/2012	10:11:24 PM	Helium MFC set to  0.000000
3/15/2012	10:11:24 PM	H2 MFC set to  0.000000
3/15/2012	10:11:24 PM	BCl3 MFC set to  0.000000
3/15/2012	10:11:24 PM	PH3 MFC set to  0.000000
3/15/2012	10:11:24 PM	SiCl4 MFC set to  0.000000
3/15/2012	10:11:24 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:11:24 PM	Tube furnace set to 0
3/15/2012	10:12:24 PM	Helium valve closed
3/15/2012	10:12:24 PM	H2 valve closed
3/15/2012	10:12:24 PM	BCl3 valve closed
3/15/2012	10:12:24 PM	PH3 valve closed
3/15/2012	10:12:24 PM	SiCl4 pre valve closed
3/15/2012	10:12:24 PM	SiCl4 post valve closed
3/15/2012	10:12:24 PM	Bypass valve closed
3/15/2012	10:12:24 PM	Bubbler valve closed
3/15/2012	10:12:24 PM	Main Vac valve opened
3/15/2012	10:12:24 PM	Helium MFC set to  0.000000
3/15/2012	10:12:24 PM	H2 MFC set to  0.000000
3/15/2012	10:12:24 PM	BCl3 MFC set to  0.000000
3/15/2012	10:12:24 PM	PH3 MFC set to  0.000000
3/15/2012	10:12:25 PM	SiCl4 MFC set to  0.000000
3/15/2012	10:12:25 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	10:12:25 PM	Tube furnace set to 0
3/15/2012	11:12:25 PM	Run finished at 11:12 PM
3/15/2012	11:32:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	11:32:30 PM	Recipe started at 11:32 PM
3/15/2012	11:32:30 PM	Helium valve closed
3/15/2012	11:32:30 PM	H2 valve closed
3/15/2012	11:32:30 PM	BCl3 valve closed
3/15/2012	11:32:30 PM	PH3 valve closed
3/15/2012	11:32:30 PM	SiCl4 pre valve closed
3/15/2012	11:32:30 PM	SiCl4 post valve closed
3/15/2012	11:32:30 PM	Main Vac valve closed
3/15/2012	11:32:30 PM	Bypass valve closed
3/15/2012	11:32:30 PM	Bubbler valve closed
3/15/2012	11:32:30 PM	Helium MFC set to  0.000000
3/15/2012	11:32:30 PM	H2 MFC set to  0.000000
3/15/2012	11:32:30 PM	BCl3 MFC set to  0.000000
3/15/2012	11:32:30 PM	PH3 MFC set to  0.000000
3/15/2012	11:32:30 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:32:30 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:32:30 PM	Tube furnace set to 0
3/15/2012	11:32:33 PM	H2 valve closed
3/15/2012	11:32:33 PM	BCl3 valve closed
3/15/2012	11:32:33 PM	PH3 valve closed
3/15/2012	11:32:33 PM	SiCl4 pre valve closed
3/15/2012	11:32:33 PM	SiCl4 post valve closed
3/15/2012	11:32:33 PM	Main Vac valve closed
3/15/2012	11:32:33 PM	Bypass valve closed
3/15/2012	11:32:33 PM	Bubbler valve closed
3/15/2012	11:32:33 PM	Helium valve opened
3/15/2012	11:32:33 PM	Helium MFC set to  500.000000
3/15/2012	11:32:33 PM	H2 MFC set to  0.000000
3/15/2012	11:32:33 PM	BCl3 MFC set to  0.000000
3/15/2012	11:32:33 PM	PH3 MFC set to  0.000000
3/15/2012	11:32:33 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:32:33 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:32:33 PM	Tube furnace set to 0
3/15/2012	11:33:35 PM	Helium valve closed
3/15/2012	11:33:35 PM	H2 valve closed
3/15/2012	11:33:35 PM	BCl3 valve closed
3/15/2012	11:33:35 PM	PH3 valve closed
3/15/2012	11:33:35 PM	SiCl4 pre valve closed
3/15/2012	11:33:35 PM	SiCl4 post valve closed
3/15/2012	11:33:35 PM	Main Vac valve closed
3/15/2012	11:33:35 PM	Bypass valve closed
3/15/2012	11:33:35 PM	Bubbler valve closed
3/15/2012	11:33:35 PM	Helium MFC set to  0.000000
3/15/2012	11:33:35 PM	H2 MFC set to  0.000000
3/15/2012	11:33:35 PM	BCl3 MFC set to  0.000000
3/15/2012	11:33:35 PM	PH3 MFC set to  0.000000
3/15/2012	11:33:35 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:33:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:33:35 PM	Tube furnace set to 0
3/15/2012	11:33:36 PM	Run finished at 11:33 PM
3/15/2012	11:33:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2012	11:37:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	11:37:36 PM	Recipe started at 11:37 PM
3/15/2012	11:37:36 PM	Helium valve closed
3/15/2012	11:37:36 PM	H2 valve closed
3/15/2012	11:37:36 PM	BCl3 valve closed
3/15/2012	11:37:36 PM	PH3 valve closed
3/15/2012	11:37:36 PM	SiCl4 pre valve closed
3/15/2012	11:37:36 PM	SiCl4 post valve closed
3/15/2012	11:37:36 PM	Main Vac valve closed
3/15/2012	11:37:36 PM	Bubbler valve closed
3/15/2012	11:37:36 PM	Bypass valve opened
3/15/2012	11:37:36 PM	Helium MFC set to  0.000000
3/15/2012	11:37:36 PM	H2 MFC set to  0.000000
3/15/2012	11:37:36 PM	BCl3 MFC set to  0.000000
3/15/2012	11:37:36 PM	PH3 MFC set to  0.000000
3/15/2012	11:37:36 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:37:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:37:37 PM	Tube furnace set to 0
3/15/2012	11:38:37 PM	Helium valve closed
3/15/2012	11:38:37 PM	H2 valve closed
3/15/2012	11:38:37 PM	BCl3 valve closed
3/15/2012	11:38:37 PM	PH3 valve closed
3/15/2012	11:38:37 PM	SiCl4 pre valve closed
3/15/2012	11:38:37 PM	SiCl4 post valve closed
3/15/2012	11:38:37 PM	Main Vac valve closed
3/15/2012	11:38:37 PM	Bubbler valve closed
3/15/2012	11:38:37 PM	Bypass valve opened
3/15/2012	11:38:37 PM	Helium MFC set to  0.000000
3/15/2012	11:38:37 PM	H2 MFC set to  0.000000
3/15/2012	11:38:37 PM	BCl3 MFC set to  0.000000
3/15/2012	11:38:37 PM	PH3 MFC set to  0.000000
3/15/2012	11:38:37 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:38:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:38:37 PM	Tube furnace set to 0
3/15/2012	11:39:37 PM	Helium valve closed
3/15/2012	11:39:37 PM	H2 valve closed
3/15/2012	11:39:37 PM	BCl3 valve closed
3/15/2012	11:39:37 PM	PH3 valve closed
3/15/2012	11:39:37 PM	SiCl4 pre valve closed
3/15/2012	11:39:37 PM	SiCl4 post valve closed
3/15/2012	11:39:37 PM	Bypass valve closed
3/15/2012	11:39:37 PM	Bubbler valve closed
3/15/2012	11:39:37 PM	Main Vac valve opened
3/15/2012	11:39:37 PM	Helium MFC set to  0.000000
3/15/2012	11:39:37 PM	H2 MFC set to  0.000000
3/15/2012	11:39:37 PM	BCl3 MFC set to  0.000000
3/15/2012	11:39:37 PM	PH3 MFC set to  0.000000
3/15/2012	11:39:37 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:39:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:39:37 PM	Tube furnace set to 0
3/15/2012	11:39:38 PM	Run finished at 11:39 PM
3/15/2012	11:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2012	11:39:51 PM	Recipe started at 11:39 PM
3/15/2012	11:39:51 PM	Helium valve closed
3/15/2012	11:39:51 PM	H2 valve closed
3/15/2012	11:39:51 PM	BCl3 valve closed
3/15/2012	11:39:51 PM	PH3 valve closed
3/15/2012	11:39:51 PM	SiCl4 pre valve closed
3/15/2012	11:39:51 PM	SiCl4 post valve closed
3/15/2012	11:39:51 PM	Bypass valve closed
3/15/2012	11:39:51 PM	Bubbler valve closed
3/15/2012	11:39:51 PM	Main Vac valve opened
3/15/2012	11:39:51 PM	Helium MFC set to  0.000000
3/15/2012	11:39:51 PM	H2 MFC set to  0.000000
3/15/2012	11:39:51 PM	BCl3 MFC set to  0.000000
3/15/2012	11:39:51 PM	PH3 MFC set to  0.000000
3/15/2012	11:39:51 PM	SiCl4 MFC set to  0.000000
3/15/2012	11:39:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2012	11:39:51 PM	Tube furnace set to 0
